High-sensitivity and low-loss SAW accelerometer base on phononic crystals

The cantilever beam-based surface acoustic wave (SAW) accelerometer has a fast response time and high sensitivity, making it widely used in vibration detection of mechanical structures. In the fabrication and production of the sensor, the sensitivity and loss of the device have always been the key f...

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Bibliographic Details
Main Authors: Yuan Rui, Xu Zhangliang, Wei Song
Format: Article
Language:English
Published: EDP Sciences 2025-01-01
Series:Acta Acustica
Subjects:
Online Access:https://acta-acustica.edpsciences.org/articles/aacus/full_html/2025/01/aacus250022/aacus250022.html
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