Integrating Strain Gauge Feedback with Adaptive Sliding Mode Motion Control for Piezoelectric Nanopositioning Stage

This paper presents an adaptive sliding mode control (ASMC) scheme based on strain gauge position feedback for compensating for motion errors in a piezoelectric nanopositioning stages and ensures precise and reliable motion tracking control. The innovation of this scheme lies in calibrating the rela...

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Bibliographic Details
Main Authors: Xianfeng Zeng, Feng Nan, Tengfei Li, Changchao Mo, Jiaqiu Su, Kaihong Wei, Xiaozhi Zhang
Format: Article
Language:English
Published: MDPI AG 2025-02-01
Series:Actuators
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Online Access:https://www.mdpi.com/2076-0825/14/2/79
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