PREPARATION AND RESEARCH OF HETEROSTRUCTURES GaP / Si BY PULSED LASER DEPOSITION

Pulsed laser deposition method was heterostructure GaP / Si. The methods of reducing the magnitude of the mechanical stresses in the resulting film, Raman scattering found that using the method of pulsed laser deposition at 300 °C for heterostructure GaP / Si is possible to reduce the value of the m...

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Bibliographic Details
Main Authors: Oleg Devitsky, Igor Sysoev, Vitaliy Batishchev, Viktor Vasiliev, Ivan Kasyanov
Format: Article
Language:Russian
Published: North Caucasus Federal University 2022-05-01
Series:Вестник Северо-Кавказского федерального университета
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Online Access:https://vestnikskfu.elpub.ru/jour/article/view/2187
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