High-order resonance enhancing the mass sensitivity of diamond cantilevers
Diamond has been demonstrated as an exceptional semiconductor for microelectromechanical system (MEMS) sensors, offering high sensitivity and reliability due to its ultra-wide bandgap energy, superior mechanical properties, and high thermal conductivity. For MEMS resonator-type sensors that rely on...
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| Main Authors: | , , , , , |
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| Format: | Article |
| Language: | English |
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AIP Publishing LLC
2025-04-01
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| Series: | APL Materials |
| Online Access: | http://dx.doi.org/10.1063/5.0250902 |
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| author | Wen Zhao Guo Chen Keyun Gu Masaya Toda Yasuo Koide Meiyong Liao |
| author_facet | Wen Zhao Guo Chen Keyun Gu Masaya Toda Yasuo Koide Meiyong Liao |
| author_sort | Wen Zhao |
| collection | DOAJ |
| description | Diamond has been demonstrated as an exceptional semiconductor for microelectromechanical system (MEMS) sensors, offering high sensitivity and reliability due to its ultra-wide bandgap energy, superior mechanical properties, and high thermal conductivity. For MEMS resonator-type sensors that rely on frequency shift detection, such as mass sensors, the overall performance, including the sensitivity, speed, resolution, and noise level, is collectively determined by the stability of the resonance frequency. To improve the sensing performance, geometry optimization and nonlinear operation methods have been used, but these methods lead to increased fabrication complexity or increased energy dissipation. In this work, we propose the utilization of high-order resonance modes to enhance the resonance frequency stability of single-crystal diamond (SCD) MEMS resonators, achieving a significant improvement in mass resolution to as low as 0.15 atto-grams at room temperature. This approach offers a streamlined and competitive strategy for advancing the sensing capabilities of MEMS sensors. |
| format | Article |
| id | doaj-art-32e8741c217b44edac1845eed0ec3c95 |
| institution | OA Journals |
| issn | 2166-532X |
| language | English |
| publishDate | 2025-04-01 |
| publisher | AIP Publishing LLC |
| record_format | Article |
| series | APL Materials |
| spelling | doaj-art-32e8741c217b44edac1845eed0ec3c952025-08-20T01:48:13ZengAIP Publishing LLCAPL Materials2166-532X2025-04-01134041124041124-1110.1063/5.0250902High-order resonance enhancing the mass sensitivity of diamond cantileversWen Zhao0Guo Chen1Keyun Gu2Masaya Toda3Yasuo Koide4Meiyong Liao5Research Center for Electronic and Optical Materials, National Institute for Materials Science, Namiki 1-1, Tsukuba, Ibaraki 305-0044, JapanResearch Center for Electronic and Optical Materials, National Institute for Materials Science, Namiki 1-1, Tsukuba, Ibaraki 305-0044, JapanResearch Center for Electronic and Optical Materials, National Institute for Materials Science, Namiki 1-1, Tsukuba, Ibaraki 305-0044, JapanGraduate School of Engineering, Tohoku University, Sendai, Miyagi 9808579, JapanResearch Center for Electronic and Optical Materials, National Institute for Materials Science, Namiki 1-1, Tsukuba, Ibaraki 305-0044, JapanResearch Center for Electronic and Optical Materials, National Institute for Materials Science, Namiki 1-1, Tsukuba, Ibaraki 305-0044, JapanDiamond has been demonstrated as an exceptional semiconductor for microelectromechanical system (MEMS) sensors, offering high sensitivity and reliability due to its ultra-wide bandgap energy, superior mechanical properties, and high thermal conductivity. For MEMS resonator-type sensors that rely on frequency shift detection, such as mass sensors, the overall performance, including the sensitivity, speed, resolution, and noise level, is collectively determined by the stability of the resonance frequency. To improve the sensing performance, geometry optimization and nonlinear operation methods have been used, but these methods lead to increased fabrication complexity or increased energy dissipation. In this work, we propose the utilization of high-order resonance modes to enhance the resonance frequency stability of single-crystal diamond (SCD) MEMS resonators, achieving a significant improvement in mass resolution to as low as 0.15 atto-grams at room temperature. This approach offers a streamlined and competitive strategy for advancing the sensing capabilities of MEMS sensors.http://dx.doi.org/10.1063/5.0250902 |
| spellingShingle | Wen Zhao Guo Chen Keyun Gu Masaya Toda Yasuo Koide Meiyong Liao High-order resonance enhancing the mass sensitivity of diamond cantilevers APL Materials |
| title | High-order resonance enhancing the mass sensitivity of diamond cantilevers |
| title_full | High-order resonance enhancing the mass sensitivity of diamond cantilevers |
| title_fullStr | High-order resonance enhancing the mass sensitivity of diamond cantilevers |
| title_full_unstemmed | High-order resonance enhancing the mass sensitivity of diamond cantilevers |
| title_short | High-order resonance enhancing the mass sensitivity of diamond cantilevers |
| title_sort | high order resonance enhancing the mass sensitivity of diamond cantilevers |
| url | http://dx.doi.org/10.1063/5.0250902 |
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