High-order resonance enhancing the mass sensitivity of diamond cantilevers
Diamond has been demonstrated as an exceptional semiconductor for microelectromechanical system (MEMS) sensors, offering high sensitivity and reliability due to its ultra-wide bandgap energy, superior mechanical properties, and high thermal conductivity. For MEMS resonator-type sensors that rely on...
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| Main Authors: | , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
AIP Publishing LLC
2025-04-01
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| Series: | APL Materials |
| Online Access: | http://dx.doi.org/10.1063/5.0250902 |
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