Research on synchronous radiation scanning transmission X-ray microscopy system closed-loop control method

Research on synchronous radiation scanning transmission X-ray microscopy system closed-loop control method

BackgroundThe Scanning Transmission X-ray Microscopy (STXM) endstation, located at the Shanghai Synchrotron Radiation Facility (SSRF), stands as China's sole STXM device. It boasts the capability for high spatial resolution imaging down to a 15 nm scale. Utilizing the scanning coherent diffract...

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Bibliographic Details
Main Authors: YAO Zhen, JIAO Yuchen, ZHAO Bo, SUN Tianxiao, ZHANG Yufei, GUO Zhi, WANG Yong, XU Zijian, LI Haitao, LIU Haigang, ZHANG Xiangzhi, TAI Renzhong
Format: Article
Language:zho
Published: Science Press 2024-09-01
Series:He jishu
Subjects:
stxm
vibration suppression
laser interferometer
piezoelectric motor
fpga
closed-loop control
Online Access:http://www.hjs.sinap.ac.cn/zh/article/doi/10.11889/j.0253-3219.2024.hjs.47.090101/
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http://www.hjs.sinap.ac.cn/zh/article/doi/10.11889/j.0253-3219.2024.hjs.47.090101/

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