Vibration of electrically actuated MEMS Timoshenko microbeams based on a hierarchical beam element
In this paper, vibration of Timoshenko microbeams with an axial force in micro-electromechanical systems (MEMS) is studied for the first time by using a nonlinear finite element procedure. Based on the von Kármán geometric nonlinearity and the modified couple stress theory (MCST), a beam element is...
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| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
Publishing House for Science and Technology
2022-12-01
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| Series: | Vietnam Journal of Mechanics |
| Subjects: | |
| Online Access: | https://vjs.ac.vn/index.php/vjmech/article/view/17909 |
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