Structure аnd Physical-Mechanical Properties of nc-TiN Coatings Obtained by Vacuum-Arc Deposition and Deposition of HF Discharge
Using scanning electron microscopy (SEM), rengen-structural analysis (RSA), adhesion strength, friction coefficient and wear rate of the material and studied the properties of the coatings nc – TiN. Depending on the bias potential applied to the substrate and the chamber pressure, the inclusion of H...
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| Main Authors: | , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Sumy State University
2011-01-01
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| Series: | Журнал нано- та електронної фізики |
| Subjects: | |
| Online Access: | http://jnep.sumdu.edu.ua/download/numbers/2011/4/articles/jnep_2011_V3_N4_097-105.pdf |
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