Metrological-Characteristics-Based Calibration of Optical Areal Surface Measuring Instruments and Evaluation of Measurement Uncertainty for Surface Texture Measurements
ISO 25178 part 600:2019 and part 700:2022 introduce a calibration framework based on seven metrological characteristics (MCs) for calibrating optical areal surface measuring instruments. Among these, topography fidelity is a newly defined metrological characteristic that remains a critical yet unres...
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| Main Authors: | Sai Gao, André Felgner, Uwe Brand |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2025-05-01
|
| Series: | Instruments |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2410-390X/9/2/11 |
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