Metrological-Characteristics-Based Calibration of Optical Areal Surface Measuring Instruments and Evaluation of Measurement Uncertainty for Surface Texture Measurements

Metrological-Characteristics-Based Calibration of Optical Areal Surface Measuring Instruments and Evaluation of Measurement Uncertainty for Surface Texture Measurements

ISO 25178 part 600:2019 and part 700:2022 introduce a calibration framework based on seven metrological characteristics (MCs) for calibrating optical areal surface measuring instruments. Among these, topography fidelity is a newly defined metrological characteristic that remains a critical yet unres...

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Bibliographic Details
Main Authors: Sai Gao, André Felgner, Uwe Brand
Format: Article
Language:English
Published: MDPI AG 2025-05-01
Series:Instruments
Subjects:
optical areal surface measuring instruments
metrological characteristics
calibration
surface texture
surface texture parameters
measurement uncertainty
Online Access:https://www.mdpi.com/2410-390X/9/2/11
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