Metrological-Characteristics-Based Calibration of Optical Areal Surface Measuring Instruments and Evaluation of Measurement Uncertainty for Surface Texture Measurements

ISO 25178 part 600:2019 and part 700:2022 introduce a calibration framework based on seven metrological characteristics (MCs) for calibrating optical areal surface measuring instruments. Among these, topography fidelity is a newly defined metrological characteristic that remains a critical yet unres...

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Main Authors: Sai Gao, André Felgner, Uwe Brand
Format: Article
Language:English
Published: MDPI AG 2025-05-01
Series:Instruments
Subjects:
Online Access:https://www.mdpi.com/2410-390X/9/2/11
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author Sai Gao
André Felgner
Uwe Brand
author_facet Sai Gao
André Felgner
Uwe Brand
author_sort Sai Gao
collection DOAJ
description ISO 25178 part 600:2019 and part 700:2022 introduce a calibration framework based on seven metrological characteristics (MCs) for calibrating optical areal surface measuring instruments. Among these, topography fidelity is a newly defined metrological characteristic that remains a critical yet unresolved challenge in instrument calibration. This paper proposes strategies to address topography fidelity, including a key criterion for selecting suitable instrument setups by comparing slope measurement capability with local surface slopes, as well as methods for investigating the field-of-view homogeneity and directional performance difference along the x- and y-axes. Furthermore, the uncertainty contribution of topography fidelity in surface topography measurements is analysed. The paper also determines the uncertainty associated with the remaining six MCs. Based on the proposed MC-based calibration approach and the corresponding uncertainty contributions, an overall measurement uncertainty model for <i>Sa</i> and <i>Sq</i> parameters is presented. Finally, uncertainty evaluations for <i>Sa</i> and <i>Sq</i> are demonstrated on a challenging surface, where topography fidelity plays a significant role in the measurement uncertainty evaluation.
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spelling doaj-art-311feca9cdc44efda640714cd3a0964d2025-08-20T03:27:29ZengMDPI AGInstruments2410-390X2025-05-01921110.3390/instruments9020011Metrological-Characteristics-Based Calibration of Optical Areal Surface Measuring Instruments and Evaluation of Measurement Uncertainty for Surface Texture MeasurementsSai Gao0André Felgner1Uwe Brand2Physikalisch-Technische Bundesanstalt, Bundesallee 100, 38116 Braunschweig, GermanyPhysikalisch-Technische Bundesanstalt, Bundesallee 100, 38116 Braunschweig, GermanyPhysikalisch-Technische Bundesanstalt, Bundesallee 100, 38116 Braunschweig, GermanyISO 25178 part 600:2019 and part 700:2022 introduce a calibration framework based on seven metrological characteristics (MCs) for calibrating optical areal surface measuring instruments. Among these, topography fidelity is a newly defined metrological characteristic that remains a critical yet unresolved challenge in instrument calibration. This paper proposes strategies to address topography fidelity, including a key criterion for selecting suitable instrument setups by comparing slope measurement capability with local surface slopes, as well as methods for investigating the field-of-view homogeneity and directional performance difference along the x- and y-axes. Furthermore, the uncertainty contribution of topography fidelity in surface topography measurements is analysed. The paper also determines the uncertainty associated with the remaining six MCs. Based on the proposed MC-based calibration approach and the corresponding uncertainty contributions, an overall measurement uncertainty model for <i>Sa</i> and <i>Sq</i> parameters is presented. Finally, uncertainty evaluations for <i>Sa</i> and <i>Sq</i> are demonstrated on a challenging surface, where topography fidelity plays a significant role in the measurement uncertainty evaluation.https://www.mdpi.com/2410-390X/9/2/11optical areal surface measuring instrumentsmetrological characteristicscalibrationsurface texturesurface texture parametersmeasurement uncertainty
spellingShingle Sai Gao
André Felgner
Uwe Brand
Metrological-Characteristics-Based Calibration of Optical Areal Surface Measuring Instruments and Evaluation of Measurement Uncertainty for Surface Texture Measurements
Instruments
optical areal surface measuring instruments
metrological characteristics
calibration
surface texture
surface texture parameters
measurement uncertainty
title Metrological-Characteristics-Based Calibration of Optical Areal Surface Measuring Instruments and Evaluation of Measurement Uncertainty for Surface Texture Measurements
title_full Metrological-Characteristics-Based Calibration of Optical Areal Surface Measuring Instruments and Evaluation of Measurement Uncertainty for Surface Texture Measurements
title_fullStr Metrological-Characteristics-Based Calibration of Optical Areal Surface Measuring Instruments and Evaluation of Measurement Uncertainty for Surface Texture Measurements
title_full_unstemmed Metrological-Characteristics-Based Calibration of Optical Areal Surface Measuring Instruments and Evaluation of Measurement Uncertainty for Surface Texture Measurements
title_short Metrological-Characteristics-Based Calibration of Optical Areal Surface Measuring Instruments and Evaluation of Measurement Uncertainty for Surface Texture Measurements
title_sort metrological characteristics based calibration of optical areal surface measuring instruments and evaluation of measurement uncertainty for surface texture measurements
topic optical areal surface measuring instruments
metrological characteristics
calibration
surface texture
surface texture parameters
measurement uncertainty
url https://www.mdpi.com/2410-390X/9/2/11
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AT andrefelgner metrologicalcharacteristicsbasedcalibrationofopticalarealsurfacemeasuringinstrumentsandevaluationofmeasurementuncertaintyforsurfacetexturemeasurements
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