Metrological-Characteristics-Based Calibration of Optical Areal Surface Measuring Instruments and Evaluation of Measurement Uncertainty for Surface Texture Measurements
ISO 25178 part 600:2019 and part 700:2022 introduce a calibration framework based on seven metrological characteristics (MCs) for calibrating optical areal surface measuring instruments. Among these, topography fidelity is a newly defined metrological characteristic that remains a critical yet unres...
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MDPI AG
2025-05-01
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| Online Access: | https://www.mdpi.com/2410-390X/9/2/11 |
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| author | Sai Gao André Felgner Uwe Brand |
| author_facet | Sai Gao André Felgner Uwe Brand |
| author_sort | Sai Gao |
| collection | DOAJ |
| description | ISO 25178 part 600:2019 and part 700:2022 introduce a calibration framework based on seven metrological characteristics (MCs) for calibrating optical areal surface measuring instruments. Among these, topography fidelity is a newly defined metrological characteristic that remains a critical yet unresolved challenge in instrument calibration. This paper proposes strategies to address topography fidelity, including a key criterion for selecting suitable instrument setups by comparing slope measurement capability with local surface slopes, as well as methods for investigating the field-of-view homogeneity and directional performance difference along the x- and y-axes. Furthermore, the uncertainty contribution of topography fidelity in surface topography measurements is analysed. The paper also determines the uncertainty associated with the remaining six MCs. Based on the proposed MC-based calibration approach and the corresponding uncertainty contributions, an overall measurement uncertainty model for <i>Sa</i> and <i>Sq</i> parameters is presented. Finally, uncertainty evaluations for <i>Sa</i> and <i>Sq</i> are demonstrated on a challenging surface, where topography fidelity plays a significant role in the measurement uncertainty evaluation. |
| format | Article |
| id | doaj-art-311feca9cdc44efda640714cd3a0964d |
| institution | Kabale University |
| issn | 2410-390X |
| language | English |
| publishDate | 2025-05-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Instruments |
| spelling | doaj-art-311feca9cdc44efda640714cd3a0964d2025-08-20T03:27:29ZengMDPI AGInstruments2410-390X2025-05-01921110.3390/instruments9020011Metrological-Characteristics-Based Calibration of Optical Areal Surface Measuring Instruments and Evaluation of Measurement Uncertainty for Surface Texture MeasurementsSai Gao0André Felgner1Uwe Brand2Physikalisch-Technische Bundesanstalt, Bundesallee 100, 38116 Braunschweig, GermanyPhysikalisch-Technische Bundesanstalt, Bundesallee 100, 38116 Braunschweig, GermanyPhysikalisch-Technische Bundesanstalt, Bundesallee 100, 38116 Braunschweig, GermanyISO 25178 part 600:2019 and part 700:2022 introduce a calibration framework based on seven metrological characteristics (MCs) for calibrating optical areal surface measuring instruments. Among these, topography fidelity is a newly defined metrological characteristic that remains a critical yet unresolved challenge in instrument calibration. This paper proposes strategies to address topography fidelity, including a key criterion for selecting suitable instrument setups by comparing slope measurement capability with local surface slopes, as well as methods for investigating the field-of-view homogeneity and directional performance difference along the x- and y-axes. Furthermore, the uncertainty contribution of topography fidelity in surface topography measurements is analysed. The paper also determines the uncertainty associated with the remaining six MCs. Based on the proposed MC-based calibration approach and the corresponding uncertainty contributions, an overall measurement uncertainty model for <i>Sa</i> and <i>Sq</i> parameters is presented. Finally, uncertainty evaluations for <i>Sa</i> and <i>Sq</i> are demonstrated on a challenging surface, where topography fidelity plays a significant role in the measurement uncertainty evaluation.https://www.mdpi.com/2410-390X/9/2/11optical areal surface measuring instrumentsmetrological characteristicscalibrationsurface texturesurface texture parametersmeasurement uncertainty |
| spellingShingle | Sai Gao André Felgner Uwe Brand Metrological-Characteristics-Based Calibration of Optical Areal Surface Measuring Instruments and Evaluation of Measurement Uncertainty for Surface Texture Measurements Instruments optical areal surface measuring instruments metrological characteristics calibration surface texture surface texture parameters measurement uncertainty |
| title | Metrological-Characteristics-Based Calibration of Optical Areal Surface Measuring Instruments and Evaluation of Measurement Uncertainty for Surface Texture Measurements |
| title_full | Metrological-Characteristics-Based Calibration of Optical Areal Surface Measuring Instruments and Evaluation of Measurement Uncertainty for Surface Texture Measurements |
| title_fullStr | Metrological-Characteristics-Based Calibration of Optical Areal Surface Measuring Instruments and Evaluation of Measurement Uncertainty for Surface Texture Measurements |
| title_full_unstemmed | Metrological-Characteristics-Based Calibration of Optical Areal Surface Measuring Instruments and Evaluation of Measurement Uncertainty for Surface Texture Measurements |
| title_short | Metrological-Characteristics-Based Calibration of Optical Areal Surface Measuring Instruments and Evaluation of Measurement Uncertainty for Surface Texture Measurements |
| title_sort | metrological characteristics based calibration of optical areal surface measuring instruments and evaluation of measurement uncertainty for surface texture measurements |
| topic | optical areal surface measuring instruments metrological characteristics calibration surface texture surface texture parameters measurement uncertainty |
| url | https://www.mdpi.com/2410-390X/9/2/11 |
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