Investigation of large-aspect ratio microgrooves on silicon nitride ceramic by WJALM
Silicon nitride (Si3N4) ceramic has excellent durability and superior outstanding mechanical properties, which makes it extensively applied in aerospace, biopharmaceuticals, semiconductors and optoelectronics. Nevertheless, the precise microfabrication of complex-shaped Si3N4 microgrooves, particula...
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Elsevier
2024-11-01
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| Series: | Journal of Materials Research and Technology |
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| Online Access: | http://www.sciencedirect.com/science/article/pii/S2238785424023792 |
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| author | Hai Su Jinjin Han Bin He Wasim Ahmad Aqib Mashood Khan Rui Ma Kai Ding Linglei Kong Qilin Li Weining Lei |
| author_facet | Hai Su Jinjin Han Bin He Wasim Ahmad Aqib Mashood Khan Rui Ma Kai Ding Linglei Kong Qilin Li Weining Lei |
| author_sort | Hai Su |
| collection | DOAJ |
| description | Silicon nitride (Si3N4) ceramic has excellent durability and superior outstanding mechanical properties, which makes it extensively applied in aerospace, biopharmaceuticals, semiconductors and optoelectronics. Nevertheless, the precise microfabrication of complex-shaped Si3N4 microgrooves, particularly those with large aspect-ratio (LAR) presents significant challenges, and traditional machining methods fall short in meeting the demanding criteria for high-precision applications due to the difficult-to-machine characteristics (e.g. high hardness, high strength and brittleness, etc.). In this research, waterjet-assisted laser machining (WJALM) is preferably adopted for LAR Si3N4 microstructures, which has demonstrated superiority in reducing thermal-induced defects of laser-only machining (LOM) with the water's impact and cooling effects. A comparative investigation of LOM and WJALM is initially conducted to evaluate the heat-affected zone (HAZ), geometric characteristics and sidewall surface quality of LAR Si3N4 microgrooves. Following that, the influence of waterjet and laser parameters on morphological characteristics for WJALM is studied through the control variable method. Results indicated that compared to LOM, the HAZ, material removal rate and sidewall surface quality of LAR microgrooves fabricated by WJALM were much superior. This research not only provides new strategies for Si3N4 microgrooves but also lays the foundation for the further development and industrial application of water-assisted laser technology. |
| format | Article |
| id | doaj-art-30f60ca55f8c4330b02dec6cdb7ac767 |
| institution | OA Journals |
| issn | 2238-7854 |
| language | English |
| publishDate | 2024-11-01 |
| publisher | Elsevier |
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| series | Journal of Materials Research and Technology |
| spelling | doaj-art-30f60ca55f8c4330b02dec6cdb7ac7672025-08-20T02:38:59ZengElsevierJournal of Materials Research and Technology2238-78542024-11-01334253426410.1016/j.jmrt.2024.10.109Investigation of large-aspect ratio microgrooves on silicon nitride ceramic by WJALMHai Su0Jinjin Han1Bin He2Wasim Ahmad3Aqib Mashood Khan4Rui Ma5Kai Ding6Linglei Kong7Qilin Li8Weining Lei9College of Mechanical Engineering, Jiangsu University of Technology, Changzhou, 213001, ChinaCollege of Mechanical Engineering, Jiangsu University of Technology, Changzhou, 213001, China; Corresponding author. Zhongwu Avenue 1801, Changzhou, 213001, China.College of Mechanical Engineering, Jiangsu University of Technology, Changzhou, 213001, ChinaCollege of Industrial Engineering, University of Engineering and Technology Taxila, Taxila, 47080, PakistanJiangsu Key Laboratory of Precision and Micro-Manufacturing Technology, Nanjing University of Aeronautics and Astronautics, Nanjing, 210016, ChinaCollege of Mechanical Engineering, Jiangsu University of Technology, Changzhou, 213001, ChinaCollege of Mechanical Engineering, Jiangsu University of Technology, Changzhou, 213001, ChinaCollege of Mechanical Engineering, Jiangsu University of Technology, Changzhou, 213001, ChinaCollege of Mechanical Engineering, Jiangsu University of Technology, Changzhou, 213001, ChinaCollege of Mechanical Engineering, Jiangsu University of Technology, Changzhou, 213001, ChinaSilicon nitride (Si3N4) ceramic has excellent durability and superior outstanding mechanical properties, which makes it extensively applied in aerospace, biopharmaceuticals, semiconductors and optoelectronics. Nevertheless, the precise microfabrication of complex-shaped Si3N4 microgrooves, particularly those with large aspect-ratio (LAR) presents significant challenges, and traditional machining methods fall short in meeting the demanding criteria for high-precision applications due to the difficult-to-machine characteristics (e.g. high hardness, high strength and brittleness, etc.). In this research, waterjet-assisted laser machining (WJALM) is preferably adopted for LAR Si3N4 microstructures, which has demonstrated superiority in reducing thermal-induced defects of laser-only machining (LOM) with the water's impact and cooling effects. A comparative investigation of LOM and WJALM is initially conducted to evaluate the heat-affected zone (HAZ), geometric characteristics and sidewall surface quality of LAR Si3N4 microgrooves. Following that, the influence of waterjet and laser parameters on morphological characteristics for WJALM is studied through the control variable method. Results indicated that compared to LOM, the HAZ, material removal rate and sidewall surface quality of LAR microgrooves fabricated by WJALM were much superior. This research not only provides new strategies for Si3N4 microgrooves but also lays the foundation for the further development and industrial application of water-assisted laser technology.http://www.sciencedirect.com/science/article/pii/S2238785424023792Si3N4 ceramicWaterjet-assisted laser machiningLaser-only machiningLarge-aspect ratio |
| spellingShingle | Hai Su Jinjin Han Bin He Wasim Ahmad Aqib Mashood Khan Rui Ma Kai Ding Linglei Kong Qilin Li Weining Lei Investigation of large-aspect ratio microgrooves on silicon nitride ceramic by WJALM Journal of Materials Research and Technology Si3N4 ceramic Waterjet-assisted laser machining Laser-only machining Large-aspect ratio |
| title | Investigation of large-aspect ratio microgrooves on silicon nitride ceramic by WJALM |
| title_full | Investigation of large-aspect ratio microgrooves on silicon nitride ceramic by WJALM |
| title_fullStr | Investigation of large-aspect ratio microgrooves on silicon nitride ceramic by WJALM |
| title_full_unstemmed | Investigation of large-aspect ratio microgrooves on silicon nitride ceramic by WJALM |
| title_short | Investigation of large-aspect ratio microgrooves on silicon nitride ceramic by WJALM |
| title_sort | investigation of large aspect ratio microgrooves on silicon nitride ceramic by wjalm |
| topic | Si3N4 ceramic Waterjet-assisted laser machining Laser-only machining Large-aspect ratio |
| url | http://www.sciencedirect.com/science/article/pii/S2238785424023792 |
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