Investigation of large-aspect ratio microgrooves on silicon nitride ceramic by WJALM
Silicon nitride (Si3N4) ceramic has excellent durability and superior outstanding mechanical properties, which makes it extensively applied in aerospace, biopharmaceuticals, semiconductors and optoelectronics. Nevertheless, the precise microfabrication of complex-shaped Si3N4 microgrooves, particula...
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| Main Authors: | , , , , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Elsevier
2024-11-01
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| Series: | Journal of Materials Research and Technology |
| Subjects: | |
| Online Access: | http://www.sciencedirect.com/science/article/pii/S2238785424023792 |
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