Characterization of New Particle Formation in Soft X-ray Radiolysis Reactor: AMCs-to-Secondary Inorganic Aerosols
Abstract Airborne molecular contaminants (AMCs) in cleanrooms should be monitored and controlled tightly to reduce yield loss since they can be converted into nanoparticles or surface haze contamination on semiconductor chips or masks. Soft X-ray radiolysis was developed to detect AMCs as low as the...
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| Main Authors: | , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Springer
2023-02-01
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| Series: | Aerosol and Air Quality Research |
| Subjects: | |
| Online Access: | https://doi.org/10.4209/aaqr.220373 |
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