Structure and Properties of Vacuum Arc Single-Layer and Multiperiod Two-Layer Nitride Coatings Based on Ti(Al):Si Layers

Structure and Properties of Vacuum Arc Single-Layer and Multiperiod Two-Layer Nitride Coatings Based on Ti(Al):Si Layers

The paper provides an analysis of impact of deposition conditions on structural and phase state and thermal stability of vacuum arc coatings based on Ti(Al):Si layers. We studied single-phase single-layer coatings, and multiperiod bilayer coatings with second phase nitride interlayers of one of the...

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Bibliographic Details
Main Authors: V.M. Beresnev, O.V. Sobol, A.D. Pogrebnjak, S.V. Lytovchenko, V.A. Stolbovoy, P.A. Srebniuk, V.Ju. Novikov, I.V. Doshchechkina, A.A. Meylehov, A.A. Postelnyk, U.S. Nyemchenko, B.A. Mazylin, V.V. Kruhlova
Format: Article
Language:English
Published: Sumy State University 2017-02-01
Series:Журнал нано- та електронної фізики
Subjects:
Nitride coatings
Multilayers coating
Composition of elements
Structure
Microhardness
Online Access:http://jnep.sumdu.edu.ua/download/numbers/2017/1/articles/jnep_V9_01033.pdf
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http://jnep.sumdu.edu.ua/download/numbers/2017/1/articles/jnep_V9_01033.pdf

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