3-DOF Inertial Piezoelectric Actuator for Angular Positioning of the Optical Mirror
Article introduces a novel 3-DOF piezoelectric actuator designed to achieve the high-precision angular motion of a spherical rotor and an optical mirror around three axes. The actuator consists of three interlinked piezoelectric bimorph plates arranged in a low-profile triangular structure. Each pie...
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| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
IEEE
2025-01-01
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| Series: | IEEE Access |
| Subjects: | |
| Online Access: | https://ieeexplore.ieee.org/document/10855440/ |
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