Mechanism of photocatalysis-assisted chemical mechanical polishing of CVD single crystal diamond

Mechanism of photocatalysis-assisted chemical mechanical polishing of CVD single crystal diamond

Chemical vapor deposition (CVD) single-crystal diamond has very promising applications in the domains of semiconductors, optical windows, and heat conductivity. However, polishing diamonds is difficult due to their extreme hardness and chemical stability. This study presents a photo catalysis-assist...

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Bibliographic Details
Main Authors:	Jianhui Zhu, Yanjun Zhao, Zewei Yuan, Haiyang Du, Yuchun Xu
Format:	Article
Language:	English
Published:	Taylor & Francis Group 2025-12-01
Series:	Functional Diamond
Subjects:	photocatalysis chemical mechanical polishing single crystal diamond mechanism
Online Access:	http://dx.doi.org/10.1080/26941112.2024.2433955
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