Mechanism of photocatalysis-assisted chemical mechanical polishing of CVD single crystal diamond
Chemical vapor deposition (CVD) single-crystal diamond has very promising applications in the domains of semiconductors, optical windows, and heat conductivity. However, polishing diamonds is difficult due to their extreme hardness and chemical stability. This study presents a photo catalysis-assist...
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| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Taylor & Francis Group
2025-12-01
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| Series: | Functional Diamond |
| Subjects: | |
| Online Access: | http://dx.doi.org/10.1080/26941112.2024.2433955 |
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