Ultrafast laser 3D nanolithography of organic–inorganic hybrid waveguide devices
On-chip micro- and nano-photonic structures are pivotal in modern industry, primarily due to their compact size, low transmission losses, and ease of integration. However, the three-dimensional (3D) bottom-up fabrication of on-chip functional structures, especially those made from inorganic material...
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| Main Authors: | , , , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
AIP Publishing LLC
2025-02-01
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| Series: | APL Photonics |
| Online Access: | http://dx.doi.org/10.1063/5.0239338 |
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