Memory State Dynamics in BEOL FeFETs: Impact of Area Ratio on Analog Write Mechanisms and Charging
This work presents dynamic state writing by combining ferroelectric (FE) polarization together with charge injection (CI) on Si-based ferroelectric MOSFETs as a novel approach for non-volatile memory design. FE capacitors are non-destructively integrated in the Back-End-of-Line (BEOL) with Si MOSFET...
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| Main Authors: | , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
IEEE
2025-01-01
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| Series: | IEEE Access |
| Subjects: | |
| Online Access: | https://ieeexplore.ieee.org/document/10835082/ |
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