A MEMS grating modulator with a tunable sinusoidal grating for large-scale extendable apertures
Abstract Microelectromechanical system (MEMS) grating modulators enable versatile beam steering functions through the electrostatic actuation of movable ribbons. These modulators operate at ultrahigh frequencies in the hundred kHz range, and their micromirror-free configuration simplifies the fabric...
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| Main Authors: | , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Nature Publishing Group
2025-03-01
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| Series: | Microsystems & Nanoengineering |
| Online Access: | https://doi.org/10.1038/s41378-025-00894-7 |
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