Nitrided Silicon-Carbon Coatings Structure and Properties
The paper considers structural and physicomechanical properties of silicon-carbon coatings deposited from a gaseous medium in doping with nitrogen ions. The analysis of the coatings by X-ray photoelectron spectroscopy shows that nitriding of silicon-carbon coatings promotes the formation of silicon...
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| Main Authors: | , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Academician Ye.A. Buketov Karaganda University
2020-06-01
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| Series: | Қарағанды университетінің хабаршысы. Физика сериясы |
| Subjects: | |
| Online Access: | https://phs.buketov.edu.kz/index.php/physics-vestnik/article/view/342 |
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