Effectiveness of Sound Field Corrections for High-Frequency Pressure Comparison Calibration of MEMS Microphones

Effectiveness of Sound Field Corrections for High-Frequency Pressure Comparison Calibration of MEMS Microphones

The calibration of Micro-Electro-Mechanical System (MEMS) microphones remains a critical challenge due to their miniaturized geometry and sensitivity to non-uniform acoustic fields. This study presents an advanced calibration methodology that integrates Finite Element Method (FEM) simulations with e...

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Bibliographic Details
Main Authors: Fabio Saba, María Campo-Valera, Davide Paesante, Giovanni Durando, Mario Corallo, Diego Pugliese
Format: Article
Language:English
Published: MDPI AG 2025-02-01
Series:Sensors
Subjects:
MEMS microphone
pressure comparison calibration
acoustic field
sound field corrections
FEM
acoustic metrology
Online Access:https://www.mdpi.com/1424-8220/25/5/1312
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