Anti‐Sticking Coatings for Imprint Tools Prepared by Initiated Chemical Vapor Deposition
Abstract Anti‐sticking coatings are an integral part of imprint processes since they facilitate an effortless and defect‐free demolding of stamp and imprint. A low surface energy is important for an easy and clean removal of the stamp from the imprint and for enabling a long lifetime of the expensiv...
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| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Wiley-VCH
2025-08-01
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| Series: | Macromolecular Materials and Engineering |
| Subjects: | |
| Online Access: | https://doi.org/10.1002/mame.202500095 |
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