Electrophysical Properties of Structures with Barium Titanate and Oxide Films Formed by the Sol-Gel Method on Titanium

Electrophysical Properties of Structures with Barium Titanate and Oxide Films Formed by the Sol-Gel Method on Titanium

Aluminum oxide and barium titanate films were formed on titanium and oxidized single-crystal silicon substrates using the sol-gel method. The dependence of the capacitance and the dielectric loss tangent on the frequency of the Al2O3/BaTiO3/Ni capacitor structure was studied in the range of 200 Hz–2...

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Bibliographic Details
Main Authors: R. T. Makhmutov, N. V. Gaponenko, E. I. Lashkovskaya, K. I. Meledin, I. A. Kashko, A. D. Malyshev, L. V. Sudnik
Format: Article
Language:Russian
Published: Educational institution «Belarusian State University of Informatics and Radioelectronics» 2025-07-01
Series:Doklady Belorusskogo gosudarstvennogo universiteta informatiki i radioèlektroniki
Subjects:
sol-gel method
capacitor
barium titanate
titanium
microdisks
waveguides
photolithography.
Online Access:https://doklady.bsuir.by/jour/article/view/4156
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