Research on Total Internal Reflection Detection Technology for Subsurface Defects of Optical Elements Based on Spectral Confocal Principles
During the manufacturing of precision optical elements, subsurface defects seriously affect the performance of the elements, leading to the enhancement of light fields, an increase in laser absorption and an decrease in mechanical properties. It has become a key technology to realize the high-precis...
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| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2025-06-01
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| Series: | Sensors |
| Subjects: | |
| Online Access: | https://www.mdpi.com/1424-8220/25/13/3969 |
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