Research on Total Internal Reflection Detection Technology for Subsurface Defects of Optical Elements Based on Spectral Confocal Principles

Research on Total Internal Reflection Detection Technology for Subsurface Defects of Optical Elements Based on Spectral Confocal Principles

During the manufacturing of precision optical elements, subsurface defects seriously affect the performance of the elements, leading to the enhancement of light fields, an increase in laser absorption and an decrease in mechanical properties. It has become a key technology to realize the high-precis...

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Bibliographic Details
Main Authors: Rongcai Bao, Kaige Qu, Lu Wu, Shijian Zhang, Anyu Sun
Format: Article
Language:English
Published: MDPI AG 2025-06-01
Series:Sensors
Subjects:
subsurface defect
nondestructive testing
spectral confocal
total internal reflection
Online Access:https://www.mdpi.com/1424-8220/25/13/3969
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