Large Built‐in Fields and Tunable Ferroelectricity in Composition‐Graded ScAlN Thin Films Deposited by Reactive Sputtering

Large Built‐in Fields and Tunable Ferroelectricity in Composition‐Graded ScAlN Thin Films Deposited by Reactive Sputtering

Abstract The control of the coercive field and growth of abnormally oriented grains (AOGs) in wurtzite ferroelectric ScxAl1‐xN thin films is crucial for piezoelectric and ferroelectric applications. However, elevated Sc concentrations generally result in significant AOG growth and high leakage curre...

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Main Authors: Tai Nguyen, Anirban Ghosh, Thang Duy Dao, Maja Koblar, Goran Drazic, Nikolai Andrianov, Iurii Nesterenko, Sanjay Nayak, Joaquin Miranda, Andreja Bencan Golob, Mohssen Moridi, Marco Deluca
Format: Article
Language:English
Published: Wiley 2025-06-01
Series:Advanced Science
Subjects:
wurtzite ferroelectrics
ScxAl1‐xN
ferroelectric shape memory
composition‐graded thin films
built‐in field
Online Access:https://doi.org/10.1002/advs.202500611
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https://doi.org/10.1002/advs.202500611

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