Detection of defects with carbon–carbon single-bonds in near-surface region of SiC induced by low-oxygen-partial-pressure annealing by using FTIR

In this study, we investigated the formation of defects with carbon–carbon single-bonds in 4H-SiC induced by high-temperature annealing under low oxygen-partial-pressure ( P o _2 ) conditions, using attenuated total reflectance Fourier-transform infrared spectroscopy. The results show that the carbo...

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Bibliographic Details
Main Authors: Chuyang Lyu, Takashi Onaya, Koji Kita
Format: Article
Language:English
Published: IOP Publishing 2025-01-01
Series:Applied Physics Express
Online Access:https://doi.org/10.35848/1882-0786/adb2db
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