The composition of anodic oxide films on InAs crystals

The elemental and chemical composition distribution over the indium arsenide anodic oxide films (AOF) thickness created by anodic oxidation in a galvanostatic mode at two current density values in an electrolyte containing fluoride ions are studied by X-ray photoelectron spectroscopy. The received d...

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Bibliographic Details
Main Authors: A. V. Artamonov, V. P. Astakhov, I. B. Varlashov, N. I. Evstaf’Eva, P. V. Mitasov
Format: Article
Language:Russian
Published: MIREA - Russian Technological University 2015-10-01
Series:Тонкие химические технологии
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Online Access:https://www.finechem-mirea.ru/jour/article/view/253
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