Research on the Key Technology of Trench Gate IGBT

Compared with planar IGBT, trench gate IGBT has obviously improved the balance between on-state loss and switching loss and is more suitable to be used in the low-medium voltage and high frequency application field. Aiming at the challenges of the trench gate process include the trench etch processi...

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Bibliographic Details
Main Authors: HUANG Jianwei, YANG Xinzhu, LIU Gen, LUO Haihui, YU Wei, TAN Canjian
Format: Article
Language:zho
Published: Editorial Office of Control and Information Technology 2015-01-01
Series:Kongzhi Yu Xinxi Jishu
Subjects:
Online Access:http://ctet.csrzic.com/thesisDetails#10.13889/j.issn.2095-3631.2015.02.012
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