Fabrication and characterization of low-loss Al/Si/Al parallel plate capacitors for superconducting quantum information applications
Abstract Increasing the density of superconducting circuits requires compact components, however, superconductor-based capacitors typically perform worse as dimensions are reduced due to loss at surfaces and interfaces. Here, parallel plate capacitors composed of aluminum-contacted, crystalline sili...
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| Main Authors: | , , , , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Nature Portfolio
2025-01-01
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| Series: | npj Quantum Information |
| Online Access: | https://doi.org/10.1038/s41534-025-00967-5 |
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