Evolution of bond structure and surface morphology of nitrogenated diamond-like carbon coatings during annealing
Abstract Nitrogenated amorphous C (a-C:N) coatings with an intermediate sp3 C fraction of 30%–55% and N content of 0–5 at.% were deposited on single-crystal silicon wafer substrates via intermittent filtered cathode vacuum arc deposition. Some of the coated specimens were annealed at 300 and 600 °C...
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| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
SpringerOpen
2025-08-01
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| Series: | Journal of Materials Science: Materials in Engineering |
| Subjects: | |
| Online Access: | https://doi.org/10.1186/s40712-025-00321-9 |
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