Influence of Annealing on the Morphology of the Vacuum-free Coatings NbNх, NbNx : Si
The paper describes the features of niobium nitride coating changes with the addition of silicon and impurities without him. Samples were prepared by magnetron sputtering at a negative potential Us = − 40 V on silicon substrate, exposed to high temperatures: 800 °C without vacuum.
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| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
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Sumy State University
2016-06-01
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| Series: | Журнал нано- та електронної фізики |
| Subjects: | |
| Online Access: | http://jnep.sumdu.edu.ua/download/numbers/2016/2/articles/jnep_2016_V8_02019.pdf |
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| _version_ | 1850235711181029376 |
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| author | V.N. Rogoz A.P. Kuzmenko O.V. Sobol’ A. Plyushchyk |
| author_facet | V.N. Rogoz A.P. Kuzmenko O.V. Sobol’ A. Plyushchyk |
| author_sort | V.N. Rogoz |
| collection | DOAJ |
| description | The paper describes the features of niobium nitride coating changes with the addition of silicon and impurities without him. Samples were prepared by magnetron sputtering at a negative potential Us = − 40 V on silicon substrate, exposed to high temperatures: 800 °C without vacuum. |
| format | Article |
| id | doaj-art-19009c7c8f19499c8c07f23b52bed9ef |
| institution | OA Journals |
| issn | 2077-6772 |
| language | English |
| publishDate | 2016-06-01 |
| publisher | Sumy State University |
| record_format | Article |
| series | Журнал нано- та електронної фізики |
| spelling | doaj-art-19009c7c8f19499c8c07f23b52bed9ef2025-08-20T02:02:09ZengSumy State UniversityЖурнал нано- та електронної фізики2077-67722016-06-018202019-102019-510.21272/jnep.8(2).02019Influence of Annealing on the Morphology of the Vacuum-free Coatings NbNх, NbNx : SiV.N. Rogoz0A.P. Kuzmenko1O.V. Sobol’2A. Plyushchyk3Sumy State University, 2, Rimskogo-Korsakova St., 40007 Sumy, UkraineKursk State Technical University, Knowledge-Intensive Technologies Center of Collaborative Access, 94, 50 Let Oktyabrya St., 305040 Kursk, Russian FederationKharkov Polytechnical Institute National Technical University, 21, Frunze St., 61002 Kharkov, UkraineSumy State University, 2, Rimskogo-Korsakova St., 40007 Sumy, UkraineThe paper describes the features of niobium nitride coating changes with the addition of silicon and impurities without him. Samples were prepared by magnetron sputtering at a negative potential Us = − 40 V on silicon substrate, exposed to high temperatures: 800 °C without vacuum.http://jnep.sumdu.edu.ua/download/numbers/2016/2/articles/jnep_2016_V8_02019.pdfMorphologyHardnessAnnealingNbNхNbNx : SiPhase and elemental analysi |
| spellingShingle | V.N. Rogoz A.P. Kuzmenko O.V. Sobol’ A. Plyushchyk Influence of Annealing on the Morphology of the Vacuum-free Coatings NbNх, NbNx : Si Журнал нано- та електронної фізики Morphology Hardness Annealing NbNх NbNx : Si Phase and elemental analysi |
| title | Influence of Annealing on the Morphology of the Vacuum-free Coatings NbNх, NbNx : Si |
| title_full | Influence of Annealing on the Morphology of the Vacuum-free Coatings NbNх, NbNx : Si |
| title_fullStr | Influence of Annealing on the Morphology of the Vacuum-free Coatings NbNх, NbNx : Si |
| title_full_unstemmed | Influence of Annealing on the Morphology of the Vacuum-free Coatings NbNх, NbNx : Si |
| title_short | Influence of Annealing on the Morphology of the Vacuum-free Coatings NbNх, NbNx : Si |
| title_sort | influence of annealing on the morphology of the vacuum free coatings nbnх nbnx si |
| topic | Morphology Hardness Annealing NbNх NbNx : Si Phase and elemental analysi |
| url | http://jnep.sumdu.edu.ua/download/numbers/2016/2/articles/jnep_2016_V8_02019.pdf |
| work_keys_str_mv | AT vnrogoz influenceofannealingonthemorphologyofthevacuumfreecoatingsnbnhnbnxsi AT apkuzmenko influenceofannealingonthemorphologyofthevacuumfreecoatingsnbnhnbnxsi AT ovsobol influenceofannealingonthemorphologyofthevacuumfreecoatingsnbnhnbnxsi AT aplyushchyk influenceofannealingonthemorphologyofthevacuumfreecoatingsnbnhnbnxsi |