Influence of Annealing on the Morphology of the Vacuum-free Coatings NbNх, NbNx : Si
The paper describes the features of niobium nitride coating changes with the addition of silicon and impurities without him. Samples were prepared by magnetron sputtering at a negative potential Us = − 40 V on silicon substrate, exposed to high temperatures: 800 °C without vacuum.
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| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Sumy State University
2016-06-01
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| Series: | Журнал нано- та електронної фізики |
| Subjects: | |
| Online Access: | http://jnep.sumdu.edu.ua/download/numbers/2016/2/articles/jnep_2016_V8_02019.pdf |
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