Enhancement of SnO2 for gas sensing applications
Thin films of SnO2 were deposited by reactive RF magnetron sputtering. It was shown that the films possess gas sensitivity to ethanol vapor at room temperature. XRD, SEM, and EDX measurements of thin films were investigated. Annealing of SnO2 thin films at 800 °С is polycrystalline and grain size of...
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| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
Mustansiriyah University
2021-06-01
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| Series: | Al-Mustansiriyah Journal of Science |
| Online Access: | http://mjs.uomustansiriyah.edu.iq/ojs1/index.php/MJS/article/view/971 |
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