Surface chemistry of c-BN epitaxial growth on diamond substrates using fluorine-assisted ECR PECVD
Epitaxial films of cubic boron nitride (c-BN) have been grown on single-crystal boron-doped diamond substrates by electron cyclotron resonance plasma-enhanced chemical vapor deposition using gas mixtures of Ar–He–N2–BF3–H2. The resulting c-BN films have been characterized using in situ x-ray photoel...
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| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
AIP Publishing LLC
2025-06-01
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| Series: | APL Materials |
| Online Access: | http://dx.doi.org/10.1063/5.0266180 |
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