Influence of short-pulsed Ion irradiation on optical and photoelectrical properties of thin gallium oxide films
In this work the influence of a short-pulsed ion irradiation with a high flux (∼5.5∙1019 cm−2s−1) on structure, optical and photo-electrical properties of gallium oxide thin films have been investigated. The films were produced by the radio-frequency magnetron sputtering method. A part of deposited...
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| Main Authors: | , , , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Elsevier
2025-02-01
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| Series: | Optical Materials: X |
| Subjects: | |
| Online Access: | http://www.sciencedirect.com/science/article/pii/S2590147824001062 |
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