Recent Design and Application Advances in Micro-Electro-Mechanical System (MEMS) Electromagnetic Actuators

Recent Design and Application Advances in Micro-Electro-Mechanical System (MEMS) Electromagnetic Actuators

Micro-electro-mechanical system (MEMS) electromagnetic actuators have rapidly evolved into critical components of various microscale applications, offering significant advantages including precision, controllability, high force density, and rapid responsiveness. Recent advancements in actuator desig...

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Bibliographic Details
Main Authors: Jianqun Cheng, Ning Xue, Bocang Qiu, Boqi Qin, Qingchun Zhao, Gang Fang, Zhihui Yao, Wenyi Zhou, Xuguang Sun
Format: Article
Language:English
Published: MDPI AG 2025-05-01
Series:Micromachines
Subjects:
electromagnetic actuation
actuator integration
micro-electro-mechanical systems
Online Access:https://www.mdpi.com/2072-666X/16/6/670
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