In-situ experiment on critical thickness of brittle-ductile transition of single-crystal silicon
Single-crystal silicon is widely used in optoelectronics and micro-electromechanical systems because of its unique physical and chemical properties. Ductile-mode removal of single-crystal silicon can be realized by strictly controlling the cutting parameters, which significantly affect the machining...
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| Main Authors: | , , , |
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| Format: | Article |
| Language: | zho |
| Published: |
Science Press
2019-03-01
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| Series: | 工程科学学报 |
| Subjects: | |
| Online Access: | http://cje.ustb.edu.cn/article/doi/10.13374/j.issn2095-9389.2019.03.007 |
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