Effect of annealing on the elastic properties of copper thin films via laser ultrasonics
The influence of rapid thermal annealing on the Young’s modulus of a copper (Cu) thin film was investigated using the laser-based surface acoustic wave spectrometry in the present study. Cu films with thicknesses ranging from 70 nm to 300 nm were prepared using a direct current magnetron sputter and...
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| Main Author: | |
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| Format: | Article |
| Language: | English |
| Published: |
Elsevier
2025-08-01
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| Series: | Materials & Design |
| Subjects: | |
| Online Access: | http://www.sciencedirect.com/science/article/pii/S0264127525006574 |
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