Porous Silicon Formation by Electrochemical Etching
Porous silicon (PSi) is used as an effective material in biomedicine, sensors, solar cells, electrochemical energy, microelectronics, and nanotechnology. Considering the dependence of PSi functional properties on pore geometry and porous layer architecture, it is important to develop methods for con...
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| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
Wiley
2022-01-01
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| Series: | Advances in Materials Science and Engineering |
| Online Access: | http://dx.doi.org/10.1155/2022/1482877 |
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