HIGH-FREQUENCY MICROINDUCTOR ON THE BASE OF FLEXIBLE POLYIMIDE FILM
A method of creation of 3D flexible high-frequency microinductor on the base of polyimide film with etched swift heavy ion tracks, filled with a conducting material is proposed. This methos is more simple as compared with existing technologies. The service model of the microinductor having dimension...
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Main Authors: | A. V. Petrov, S. E. Demyanov, E. Yu. Kaniukov, D. Fink |
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Format: | Article |
Language: | English |
Published: |
Belarusian National Technical University
2015-04-01
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Series: | Приборы и методы измерений |
Subjects: | |
Online Access: | https://pimi.bntu.by/jour/article/view/135 |
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