Detection of Hidden Defects Induced by Thermomechanical Processing of Aluminum Substrates for Sensor Devices Using a Scanning Kelvin Probe

The object of the study was aluminum substrates for creating sensor devices based on anodic aluminum oxide, which underwent mechanical processing in the form of grinding and straightening. The subject of the study was the detection of residual mechanical stresses and other surface defects to assess...

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Bibliographic Details
Main Authors: A. L Zharin, I. V. Gasenkova, A. K. Tyavlovsky, N. I. Mukhurov, S. I. Spitski
Format: Article
Language:English
Published: Belarusian National Technical University 2025-03-01
Series:Приборы и методы измерений
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Online Access:https://pimi.bntu.by/jour/article/view/923
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