Investigation of the Measurement Systems’ Suitability for the Non-Destructive Measurement of Complex Polymer-Based Micro and Nanostructures
In the fabrication of optical polymer-based components, such as diffractive gratings and waveguides, high throughput and high precision are required. The non-destructive evaluation of these complex polymer-based structures is a significant challenge. Different measurement techniques can measure the...
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| Main Authors: | , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2024-11-01
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| Series: | Metrology |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2673-8244/4/4/40 |
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