Investigation of the Measurement Systems’ Suitability for the Non-Destructive Measurement of Complex Polymer-Based Micro and Nanostructures

In the fabrication of optical polymer-based components, such as diffractive gratings and waveguides, high throughput and high precision are required. The non-destructive evaluation of these complex polymer-based structures is a significant challenge. Different measurement techniques can measure the...

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Bibliographic Details
Main Authors: Selina Burkert, Lukas Schwörer, Tim Schubert, Jana Grundmann, David Stein, Andreas Heinrich
Format: Article
Language:English
Published: MDPI AG 2024-11-01
Series:Metrology
Subjects:
Online Access:https://www.mdpi.com/2673-8244/4/4/40
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