A microgripper based on electrothermal Al–SiO2 bimorphs
Abstract Microgrippers are essential for assembly and manipulation at the micro- and nano-scales, facilitating important applications in microelectronics, MEMS, and biomedical engineering. To guarantee the safe handling of delicate materials and micro-objects, a microgripper needs to be designed to...
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| Main Authors: | , , , , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Nature Publishing Group
2024-12-01
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| Series: | Microsystems & Nanoengineering |
| Online Access: | https://doi.org/10.1038/s41378-024-00821-2 |
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