Ion Current Density Calculation of the Inductive Radio Frequency Ion Source
A radio-frequency (RF) inductive ion source at 27.12 MHz is investigated. With a global model of the argon discharge, plasma density, electron temperature and ion current density of the ion source is calculated in relation to absorbed RF power and gas pressure as a discharge chamber size changes. It...
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| Format: | Article |
| Language: | English |
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Sumy State University
2012-10-01
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| Series: | Журнал нано- та електронної фізики |
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| Online Access: | http://jnep.sumdu.edu.ua/download/numbers/2012/3/articles/jnep_2012_V4_03019.pdf |
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| author | V.I. Voznyi V.E. Storizhko V.I. Miroshnichenko D.P. Shulha |
| author_facet | V.I. Voznyi V.E. Storizhko V.I. Miroshnichenko D.P. Shulha |
| author_sort | V.I. Voznyi |
| collection | DOAJ |
| description | A radio-frequency (RF) inductive ion source at 27.12 MHz is investigated. With a global model of the argon discharge, plasma density, electron temperature and ion current density of the ion source is calculated in relation to absorbed RF power and gas pressure as a discharge chamber size changes. It is found that ion beam current density grows as the discharge chamber size decreases. Calculations show that in the RF source with a discharge chamber 30 mm in diameter and 35 mm long the ion current density is 40 mA/cm2 at 100 W of absorbed RF power and 7 mTorr of pressure, and agrees well with experimentally measured value of 43 mA/cm2. With decreasing discharge chamber diameter to 15 mm ion current density can reach 85 mA/cm2 at absorbed RF power of 100 W. |
| format | Article |
| id | doaj-art-10d9fbd3126945ff92a722969ebac672 |
| institution | DOAJ |
| issn | 2077-6772 |
| language | English |
| publishDate | 2012-10-01 |
| publisher | Sumy State University |
| record_format | Article |
| series | Журнал нано- та електронної фізики |
| spelling | doaj-art-10d9fbd3126945ff92a722969ebac6722025-08-20T03:17:15ZengSumy State UniversityЖурнал нано- та електронної фізики2077-67722012-10-0143030191Ion Current Density Calculation of the Inductive Radio Frequency Ion SourceV.I. VoznyiV.E. StorizhkoV.I. MiroshnichenkoD.P. ShulhaA radio-frequency (RF) inductive ion source at 27.12 MHz is investigated. With a global model of the argon discharge, plasma density, electron temperature and ion current density of the ion source is calculated in relation to absorbed RF power and gas pressure as a discharge chamber size changes. It is found that ion beam current density grows as the discharge chamber size decreases. Calculations show that in the RF source with a discharge chamber 30 mm in diameter and 35 mm long the ion current density is 40 mA/cm2 at 100 W of absorbed RF power and 7 mTorr of pressure, and agrees well with experimentally measured value of 43 mA/cm2. With decreasing discharge chamber diameter to 15 mm ion current density can reach 85 mA/cm2 at absorbed RF power of 100 W.http://jnep.sumdu.edu.ua/download/numbers/2012/3/articles/jnep_2012_V4_03019.pdfRF ion sourceIon beamPlasmaCurrent densit |
| spellingShingle | V.I. Voznyi V.E. Storizhko V.I. Miroshnichenko D.P. Shulha Ion Current Density Calculation of the Inductive Radio Frequency Ion Source Журнал нано- та електронної фізики RF ion source Ion beam Plasma Current densit |
| title | Ion Current Density Calculation of the Inductive Radio Frequency Ion Source |
| title_full | Ion Current Density Calculation of the Inductive Radio Frequency Ion Source |
| title_fullStr | Ion Current Density Calculation of the Inductive Radio Frequency Ion Source |
| title_full_unstemmed | Ion Current Density Calculation of the Inductive Radio Frequency Ion Source |
| title_short | Ion Current Density Calculation of the Inductive Radio Frequency Ion Source |
| title_sort | ion current density calculation of the inductive radio frequency ion source |
| topic | RF ion source Ion beam Plasma Current densit |
| url | http://jnep.sumdu.edu.ua/download/numbers/2012/3/articles/jnep_2012_V4_03019.pdf |
| work_keys_str_mv | AT vivoznyi ioncurrentdensitycalculationoftheinductiveradiofrequencyionsource AT vestorizhko ioncurrentdensitycalculationoftheinductiveradiofrequencyionsource AT vimiroshnichenko ioncurrentdensitycalculationoftheinductiveradiofrequencyionsource AT dpshulha ioncurrentdensitycalculationoftheinductiveradiofrequencyionsource |