Ion Current Density Calculation of the Inductive Radio Frequency Ion Source
A radio-frequency (RF) inductive ion source at 27.12 MHz is investigated. With a global model of the argon discharge, plasma density, electron temperature and ion current density of the ion source is calculated in relation to absorbed RF power and gas pressure as a discharge chamber size changes. It...
Saved in:
| Main Authors: | , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
Sumy State University
2012-10-01
|
| Series: | Журнал нано- та електронної фізики |
| Subjects: | |
| Online Access: | http://jnep.sumdu.edu.ua/download/numbers/2012/3/articles/jnep_2012_V4_03019.pdf |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|