Highly Efficient Digitized Quasi-3D Photolithography Based on a Modified Golomb Coding via DMD Laser Direct Writing
Three-dimensional (3D) photolithography has found wide applications in microelectronics, optoelectronics, biomedicine, etc. Traditionally, it requires repetitive exposure and developing cycles. Meanwhile, a laser direct writing (LDW) system with a digital micromirror device (DMD) enables high-speed...
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| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2025-06-01
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| Series: | Photonics |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2304-6732/12/6/587 |
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